Optoelectronic Fabrication Cleanroom (Rm 211)
The 800 sq. ft. cleanroom is a multi-user facility consisting of class 100 and class 10,000 cleanrooms, and is used in the development of optoelectronic semiconductor devices.
The facility equipment includes a Suss MJB-3 aligner, a Plasma-Therm 790 RIE/PECVD, an Edwards thermal evaporator, along with a bonder, a scriber and microscope.
Photonic Waveguide Characterization Laboratory (Rm 223)
This laboratory is equipped with several tunable laser systems and nanopositioning and imaging equipment for measuring many different types of active and passive optical waveguide devices.